|MOPLO07||MEMS Based Multibeam Ion Linacs||249|
Funding: Work at LBNL was conducted under the auspices of the US DOE (DE-AC0205CH11231) and supported by ArpaE. Device fab at the Cornell Nano Fab facility was supported by NSF (Grant 384 No.ECCS-1542081).
We report on the development of multi-beam RF linear ion accelerators that are formed from stacks o low cost wafers. Wafers are prepared using MEMS techniques. We have demonstrated acceleration of ions in a 3x3 beamlet array with ion currents in the 0.1 mA range and acceleration at the 10 keV in lattice of RF (13 MHz) acceleration units and electrostatic quadrupoles. We will describe the status and plans for scaling to 10x10 beams, ion currents >1 mA and ion energies >100 keV in a compact, low cost setup for applications in materials processing.
 P. A. Seidl, et al., Rev. Sci. Instr. 89, 053302 (2018); doi: 10.1063/1.5023415
|DOI •||reference for this paper ※ https://doi.org/10.18429/JACoW-NAPAC2019-MOPLO07|
|About •||paper received ※ 27 August 2019 paper accepted ※ 16 November 2020 issue date ※ 08 October 2019|
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